Hermitically sealed Ultra-Miniature fiber-optic pressure sensor

S. Nakamura, T. Matsunaga, K. Totsu, M. Esashi, Y. Haga

研究成果: Paper査読

1 被引用数 (Scopus)

抄録

Ultra-Miniature fiber optic sensor of 125 μm diameter has been developed by using MEMS fabrication techniques. The Fabry-Perot cavity is formed at the end of an optical fiber. The pressure induced deformation of the Fabry-Perot cavity diaphragm alters the cavity length. Fabricated sensor structures exhibited temperature dependency. To solve this problem, hermetic sealing using a thin-film solder bonding and Cr thin-film deposition on the sidewall of the sensor have been tried.

本文言語English
ページ1553-1556
ページ数4
出版ステータスPublished - 2006 12 1
イベント13th International Display Workshops, IDW '06 - Otsu, Japan
継続期間: 2006 12 62006 12 6

Other

Other13th International Display Workshops, IDW '06
CountryJapan
CityOtsu
Period06/12/606/12/6

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Radiology Nuclear Medicine and imaging
  • Atomic and Molecular Physics, and Optics

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