LiCaAlF6 (LiCAF) single crystals with an extended diameter were grown by the Czochralski (CZ) technique under CF4 atmosphere. Modifying the growth conditions enabled the growth of LiCAF single crystals with 3- and 4-inch diameters. After considering reflection loss, LiCAF showed transmittance over 95% at 157 nm. A precise measurement of the refractive index showed that the birefringence of LiCAF vanished at around 152 nm. The fabrication of a LiCAF lens was demonstrated.
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