Growth of 〈11̄00〉 epitaxial ZnO film on Y-Plane LiNbO 3 substrate

Michio Kadota, Yoshihiro Ito, Hideaki Kobayashi

研究成果: Article査読

9 被引用数 (Scopus)

抄録

A 〈0001〉 oriented polycrystal ZnO film is deposited on many types of substrate. However, an epitaxial ZnO film is deposited on only specific substrates, because it depends greatly on the lattice constant of the substrate. An epitaxial ZnO film with the c-axis oriented horizontally on some types of substrate has been reported. In this study, a 〈1100〉 orientated epitaxial ZnO film has been deposited on a pre-heat-treated Y-plane (0110) LiNbO3 substrate for the first time. A 〈0001〉 oriented polycrystal ZnO film has also been deposited on this substrate without pre-heat-treatment. Thus, two orientation directions can be controlled by pre-heat-treatment for the first time. Moreover, their applications to shear bulk wave transducers and surface acoustic wave devices are discussed.

本文言語English
ページ(範囲)4104-4107
ページ数4
ジャーナルJapanese journal of applied physics
47
5 PART 2
DOI
出版ステータスPublished - 2008 5 23

ASJC Scopus subject areas

  • 工学(全般)
  • 物理学および天文学(全般)

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