Grating-coupled light emission from the slow mode of metal-insulator-metal tunnel junctions

Sukekatsu Ushioda, Yoichi Uehara, Masatoshi Takada, Koji Otsubo, Junichi Murota

研究成果: Article査読

16 被引用数 (Scopus)

抄録

We have observed the direct light emission from the slow mode of surface plasmon polaritons (SPP) of metal-insulator-metal (MIM) tunnel junctions formed on a ultra-fine grating. The grating (period=100 nm, groove depth=12 nm, area=200 µm×200 µm) was created on a Si(100) wafer, using a direct electron beam lithography technique and wet etching of SiO2 The MIM junction was formed by evaporation of Al and Au films on this grating. The emission peak for the Al-Oxide-Au junction was observed at 1.55 eV that is expected from the dispersion curve of the slow mode. The spectral width is appreciably narrower than the emission due to the natural residual micro-roughness of the junction.

本文言語English
ページ(範囲)L870-L873
ジャーナルJapanese journal of applied physics
31
7
DOI
出版ステータスPublished - 1992 7

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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