Graphene nano-ribbon-base highly sensitive pressure sensor using area-arrayed pillar structure

研究成果: Conference contribution

1 被引用数 (Scopus)

抄録

A novel highly sensitive pressure sensor was proposed in this paper. It has high flexibility (wearable) and modularization fabrication ability (high productivity and low cost). The proposed sensor structure was combined with two sections: a stress-concentration section and a stress-detecting section. The stress-concentration section has been successfully developed using PDMS patterned and copied from SU-8 micro structure, and the quality of the section was optimized by experiment of parameters matrix. The fabrication process of the stress-detecting section was also developed. Young's modulus of the PDMS thin film, which is the main part of the pressure sensor, was measured by using a nano-indenter.

本文言語English
ホスト出版物のタイトルIMPACT 2017 - 12th International Microsystems, Packaging, Assembly and Circuits Technology Conference, Proceedings
出版社IEEE Computer Society
ページ46-49
ページ数4
ISBN(電子版)9781538647196
DOI
出版ステータスPublished - 2017 7 1
イベント12th International Microsystems, Packaging, Assembly and Circuits Technology Conference, IMPACT 2017 - Taipei, Taiwan, Province of China
継続期間: 2017 10 252017 10 27

出版物シリーズ

名前Proceedings of Technical Papers - International Microsystems, Packaging, Assembly, and Circuits Technology Conference, IMPACT
2017-October
ISSN(印刷版)2150-5934
ISSN(電子版)2150-5942

Other

Other12th International Microsystems, Packaging, Assembly and Circuits Technology Conference, IMPACT 2017
CountryTaiwan, Province of China
CityTaipei
Period17/10/2517/10/27

ASJC Scopus subject areas

  • Hardware and Architecture
  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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