Glancing-incidence and glancing-takeoff X-ray fluorescence analysis of a Mn ultrathin film on an Au layer

Kouichi Tsuji, Shigeo Sato, Kichinosuke Hirokawa

研究成果: Article査読

10 被引用数 (Scopus)

抄録

We have developed a new analytical method, the glancing-incidence and glancing-takeoff X-ray fluorescence (GIT-XRF) method. By using this method, X-ray fluorescence can be measured at various incident and takeoff angles, and the experimental results are compared with the calculated curves. As a result, we can obtain information such as the thickness and density of thin films. Compared with the total reflection X-ray fluorescence method, the advantages of the GIT-XRF method are that it allows a surface-sensitive analysis and a detailed thin-film analysis. In this paper, we will show how the GIT-XRF method is useful for thin-film analysis of Mn-Au double layers.

本文言語English
ページ(範囲)18-22
ページ数5
ジャーナルThin Solid Films
274
1-2
DOI
出版ステータスPublished - 1996 3

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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