Nanoimprint lithography has been applied to the manufacture of microlenses, antireflection films, and biochips because of its cost reduction advantage. Previously, we demonstrated a gas-permeable template derived from a thermal cross-linkable cellulose derivative with methacrylate (HPC-MOI) that eliminated defects due to the concentration of acetone gas between the template and the imprint material. In this study, we prepared a thermoset cellulose derivative with acrylate as the gas-permeable template (HPC-AOI). The results of Raman spectroscopy and indentation test confirmed that HPC-AOI had a very high cross-linking density when heated for 10 min. The micrographs and three-dimensional (3D) image of the 5μm line and space pattern in the UV cross-linked material containing a volatile solvent showed that void defects were removed and edges were sharper when the HPC-AOI template was utilized.
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