Fundamental study on the new probe technique for the nano-CMM based on the laser trapping and Mirau interferometer

Yasuhiro Takaya, Hiroki Shimizu, Satoru Takahashi, Takashi Miyoshi

研究成果: Article査読

20 被引用数 (Scopus)

抄録

The nano-CMM as a coordinate measuring machine for micron-sized 3-D shapes is required to satisfy the measuring range of about a cubic centimetre and the accuracy of less than 50 nm. In order to develop such a nano-CMM, the probe with a microsphere must achieve detecting accuracy of nanometre order and a contact pressure force of less than 10 N. In this paper, a new probe technique for nano-CMM using a laser trapped microsphere is proposed. The principle of measurement based on the laser trapping technique and the microscope interferometer is presented. Computer simulations of radiation pressure force are performed to develop the laser trapping probe experimental system. Three-dimensional trapping of a microsphere is achieved. The contact position is estimated by measuring the displacement of the microsphere.

本文言語English
ページ(範囲)9-18
ページ数10
ジャーナルMeasurement: Journal of the International Measurement Confederation
25
1
DOI
出版ステータスPublished - 1999
外部発表はい

ASJC Scopus subject areas

  • Instrumentation
  • Electrical and Electronic Engineering

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