Fundamental properties and nano-imprintabilities of Zr-, Pd- and Cu-based glassy alloy thin films

Kana Takenaka, Noriko Saidoh, Nobuyuki Nishiyama, Akihisa Inoue

研究成果: Conference contribution

抄録

With the aim of investigating fundamental properties and nano-imprintabilities of glassy alloy in the film form, Zr 49Al 11Ni 8Cu 32, Pd 39Cu 29Ni 13P 19 and Cu 38Zr 47Al 9Ag 6 alloy thin films were fabricated on Si substrate by a magnetron sputtering method. These thin films exhibit distinct glass-tradition phenomenon and large supercooled liquid region of about 80 K, confirming as a glassy structure and have very smooth surface and sufficient hardness to maintain imprinted shape, which are suitable for nano-imprint processing. Moreover, thermal nano-imprintabilies of these obtained films are demonstrated by using a dot array mold with a dot diameter of 90 nm and a pitch of 180 nm. Surface observations revealed that periodic nano-hole arrays were successfully imprinted on the surface of these films and precisely corresponded to the periodic dot pattern of the mold. Particularly, Pd-based glassy alloy thin film indicated more precise pattern imprintabiliry, namely, more flat residual surface plane and sharper hole edge. These results suggest that these glassy alloy thin films, especially Pd-based glassy alloy thin film have high potential for application to the nano-imprinting materials.

本文言語English
ホスト出版物のタイトルBulk Metallic Glasses and their Applications
ページ1-6
ページ数6
DOI
出版ステータスPublished - 2011
イベント2010 MRS Fall Meeting - Boston, MA, United States
継続期間: 2010 11 292010 12 3

出版物シリーズ

名前Materials Research Society Symposium Proceedings
1300
ISSN(印刷版)0272-9172

Other

Other2010 MRS Fall Meeting
CountryUnited States
CityBoston, MA
Period10/11/2910/12/3

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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