Fundamental investigation of influence of air compressibility on displacement control performances of aerostatic bearings

Yohichi Nakao, Daiki Fukui, Satsuki Yamazaki, Junpei Kusuyama, Dmytro Fedorynenko

研究成果: Conference contribution

抄録

This paper deals with displacement control of aerostatic bearings. Displacement of the aerostatic bearings can be controlled by controlling supplied air flow based on an appropriately designed feedback controller. The static characteristics of the designed feedback system were investigated experimentally. It is then shown that the positioning accuracy of the tested system was the tens of the nanometers. In addition, the influence of the air compressibility on the dynamic characteristics of the control system is investigated via simulation studies. The simulation studies reveal the air compressibility of the aerostatic bearings increases the time delay of response.

本文言語English
ホスト出版物のタイトルEuropean Society for Precision Engineering and Nanotechnology, Conference Proceedings - 19th International Conference and Exhibition, EUSPEN 2019
編集者Richard K. Leach, D. Billington, C. Nisbet, D. Phillips
出版社euspen
ページ560-561
ページ数2
ISBN(電子版)9780995775145
出版ステータスPublished - 2019
外部発表はい
イベント19th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2019 - Bilbao, Spain
継続期間: 2019 6 32019 6 7

出版物シリーズ

名前European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 19th International Conference and Exhibition, EUSPEN 2019

Conference

Conference19th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2019
国/地域Spain
CityBilbao
Period19/6/319/6/7

ASJC Scopus subject areas

  • 機械工学
  • 材料科学(全般)
  • 産業および生産工学
  • 器械工学
  • 環境工学

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