Full-fiber-type sensing system for physical quantities using a photothermally vibrated quartz-core cantilever

Hironori Kumazaki, Seiki Inaba, Kazuhiro Hane

研究成果: Article査読

1 被引用数 (Scopus)

抄録

A quartz-core cantilever fabricated from an optical fiber tip is proposed as a practical sensor for measurement of various physical quantities. Its operation is based on the principle that the resonance characteristics of the photothermally vibrated cantilever vary with the surrounding physical quantities. The cantilever is studied as a mechanical sensor for monitoring film thickness, liquid density and viscosity using a excitation vibration and detection system constructed solely of optical fiber. Thickness monitoring of Au film is possible with an accuracy of 0.5 nm up to a thickness of 500 nm. By utilizing the cantilever in liquid, the resonance frequency and half-power width dependence on the density and viscosity of the liquid were determined.

本文言語English
ページ(範囲)105-110
ページ数6
ジャーナルIEEJ Transactions on Sensors and Micromachines
120
3
DOI
出版ステータスPublished - 2000

ASJC Scopus subject areas

  • 機械工学
  • 電子工学および電気工学

フィンガープリント

「Full-fiber-type sensing system for physical quantities using a photothermally vibrated quartz-core cantilever」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル