Frequency trimming of zno/glass saw filters

Michio Kadota, Chikashi Kondo, Toshiaki Ikeda, Toru Kasanami

研究成果: Article査読

8 被引用数 (Scopus)

抄録

In the process of producing ZnO/glass SAW filters, a desired frequency cannot always be obtained after sputtering ZnO thin films on IDT/glass substrates. It is therefore necessary to adjust the center frequency of each Wfilter within 0.05% tolerance after sputtering. We have developed a method to adjust the center frequency in a mass production process by overlaying organic polymer resin on the substrates. The frequency deviation then becomes very small not only in one lot, but also between lots, and the mass production cost of &4 W filters can be reduced tremendously.

本文言語English
ページ(範囲)179-181
ページ数3
ジャーナルJapanese journal of applied physics
30
DOI
出版ステータスPublished - 1991 1

ASJC Scopus subject areas

  • 工学(全般)
  • 物理学および天文学(全般)

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