Formation of slit-like voids at trench corners of damascene Cu interconnects

Atsuko Sekiguchi, Junichi Koike, Kouichi Maruyama

研究成果: Article査読

9 被引用数 (Scopus)

抄録

Stress voiding was investigated in damascene Cu lines embedded in Ta/TaN/SiO2/Si. Microstructure was observed before and after heat treatment at 723 K using a focused ion beam (FIB) technique. The distribution of thermal stress was calculated using a three-dimensional finite element method (FEM). FIB observation revealed that slit-like voids were formed at trench shoulders both before and after heat treatment. FEM calculation indicated that a large shear stress concentration occurred at the voided sites. The coincidence between the FIB observation and the FEM calculation suggests that the slit-like voids were formed by shear-mode delamination of Cu from the Ta/TaN barrier layer.

本文言語English
ページ(範囲)1633-1637
ページ数5
ジャーナルMaterials Transactions
43
7
DOI
出版ステータスPublished - 2002 7
外部発表はい

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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