Formation of SiC layer by carbonization of Si surface using CO gas

Momoko Deura, Hiroyuki Fukuyama

研究成果: Article査読

1 被引用数 (Scopus)

抄録

Carbonization of Si surfaces was performed using C-saturated CO gas. The experimental conditions were determined by considering the phase stability diagram for the SiC-SiO2-CO system constructed using thermodynamic data. Annealing Si substrates under the SiC-stable condition led to the formation of SiC over the entire surfaces of Si(100), Si(110), and Si(111) substrates. During carbonization, SiC nuclei first form on the Si surface. These nuclei advances grow through the surface diffusion of Si atoms, which leads to poor in-plane uniformity of the amount of SiC and the formation of numerous voids in a similar manner to that observed for other C sources.

本文言語English
ページ(範囲)77-80
ページ数4
ジャーナルJournal of Crystal Growth
434
DOI
出版ステータスPublished - 2016 1 15

ASJC Scopus subject areas

  • 凝縮系物理学
  • 無機化学
  • 材料化学

フィンガープリント

「Formation of SiC layer by carbonization of Si surface using CO gas」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル