Formation of nanostructured metallic glass thin films upon sputtering

Sergey Ketov, Rastko Joksimovic, Guoqiang Xie, Artem Trifonov, Kazue Kurihara, Dmitri V. Louzguine-Luzgin

研究成果: Article査読

19 被引用数 (Scopus)

抄録

Morphology evolution of the multicomponent metallic glass film obtained by radio frequency (RF) magnetron sputtering was investigated in the present work. Two modes of metallic glass sputtering were distinguished: smooth film mode and clustered film mode. The sputtering parameters, which have the most influence on the sputtering modes, were determined. As a result, amorphous Ni-Nb thin films with a smooth surface and nanoglassy structure were deposited on silica float glass and Si substrates. The phase composition of the target appeared to have a significant influence on the chemical composition of the deposited amorphous thin film. The differences in charge transport and nanomechanical properties between the smooth and nanoglassy Ni-Nb film were also determined.

本文言語English
論文番号e00228
ジャーナルHeliyon
3
1
DOI
出版ステータスPublished - 2017 1月 1

ASJC Scopus subject areas

  • 一般

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