Formation of diamond-like carbon films by photoemission-assisted plasma-enhanced chemical vapor deposition

Meng Yang, Susumu Takabayashi, Shuichi Ogawa, Hiroyuki Hayashi, Radek Ješko, Taiichi Otsuji, Yuji Takakuwa

研究成果: Article査読

10 被引用数 (Scopus)

抄録

Diamond-like carbon (DLC) films, which are an amorphous carbonaceous allotrope composed of sp2 carbon, sp3 carbon, and hydrogen, were prepared by photoemission-assisted plasma-enhanced chemical vapor deposition (PA-PECVD). The electrical behavior during film growth monotonically depended on the methane source gas concentration. Raman analysis of the films suggests that a DLC film grown at a high methane concentration condition contains a small number of graphitic domains, decreasing amorphicity of the film. In contrast, at a low concentration, the methane molecules were transformed into sufficiently fragmented radicals, forming a lot of graphitic nuclei and increasing the amorphicity. However, the variations of the relative dielectric constant, breakdown strength, and optical bandgap exhibited extreme values at an intermediate methane concentration. Thus, the two growth modes give different DLC films with varying combinations of electrical and optical characteristics.

本文言語English
論文番号110123
ジャーナルJapanese journal of applied physics
52
11 PART 1
DOI
出版ステータスPublished - 2013 11 1

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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