Fluctuation mechanism of mechanical properties of electroplated-copper thin films used for three dimensional electronic modules

Hideo Miura, Ken Suzuki, Kinji Tamakawa

研究成果: Conference contribution

6 被引用数 (Scopus)

抄録

The mechanical properties of copper thin films formed by cold-rolling and electroplating were compared using tensile test and nano-indentation. Both the Young's modulus and tensile strength of the films were found to vary drastically depending on the microstructure in the films. The Young's modulus of the cold-rolled film was almost same as that of bulk material However, the Young's modulus of the electroplated thin film was about a fourth of that of bulk material The micro structure of the electroplated film was polycrystalline and a columnar structure with a diameter of a few hundred-micron. The strength of the grain boundaries of the columnar grains seemed to be rather week. Such a columnar structure causes the cooperative grain boundary sliding and the film shows low elasticity and superplastic deformation. In addition, there was a sharp distribution of Young's modulus along the thickness direction of the film. Though the modulus near the surface of the film was close to that of bulk material, it decreased drastically to about a half within the depth of about 1 μm. There was also a plane distribution of Young's modulus near the surface of the film.

本文言語English
ホスト出版物のタイトルEuroSime 2007
ホスト出版物のサブタイトルInternational Conference on Thermal, Mechanical and Multi-Physics Simulation Experiments in Microelectronics and Micro-Systems, 2007
DOI
出版ステータスPublished - 2007 11 27
イベントEuroSime 2007: International Conference on Thermal, Mechanical and Multi-Physics Simulation Experiments in Microelectronics and Micro-Systems, 2007 - London, United Kingdom
継続期間: 2007 4 162007 4 18

出版物シリーズ

名前EuroSime 2007: International Conference on Thermal, Mechanical and Multi-Physics Simulation Experiments in Microelectronics and Micro-Systems, 2007

Other

OtherEuroSime 2007: International Conference on Thermal, Mechanical and Multi-Physics Simulation Experiments in Microelectronics and Micro-Systems, 2007
CountryUnited Kingdom
CityLondon
Period07/4/1607/4/18

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Surfaces, Coatings and Films
  • Condensed Matter Physics

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