First principles calculation of dopant solution energy in HfO 2 polymorphs

M. Saitoh, T. Mizoguchi, T. Tohei, Y. Ikuhara

    研究成果: Article査読

    8 被引用数 (Scopus)

    抄録

    The solution behavior of dopants, Si, La, and N, in HfO 2 polymorphs, monoclinic, tetragonal, and cubic was investigated by using a first principles calculation based on density functional theory within the local density approximation. It was found that the Si and La solutions are more preferable under oxidization atmosphere than reduction atmosphere, and the most efficient nitridation condition for the HfO 2 is NO/NO 2 atmosphere. By comparing the energy difference between the monoclinic and the tetragonal phases, it was found that the energy difference is decreased by the Si or La doping, whereas influence of the N doping is small, indicating that the phase transition from the monoclinic to tetragonal phase would be enhanced by the Si or La doping.

    本文言語English
    論文番号084514
    ジャーナルJournal of Applied Physics
    112
    8
    DOI
    出版ステータスPublished - 2012 10月 15

    ASJC Scopus subject areas

    • 物理学および天文学(全般)

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