@inproceedings{0c5dea7128fe4aa5bdc3b6d77705c126,
title = "Ferromagnetic RF integrated inductor with closed magnetic circuit structure",
abstract = "Closed magnetic circuit type ferromagnetic RF integrated inductors have been fabricated based on MEMS-like micro fabrication techniques. The taper etching process greatly helped to endure sufficient magnetic flux flow at the edge of the top and bottom magnetic layers. Air cores and three different sandwich type ferromagnetic inductos are also microfabricated. Measured results exhibited the quality factor Q=12, being highest among the published data of ferromagnetic RF integrated Inductor at 1 GHz.",
keywords = "Electromagnetic field simulation, Integrated inductor, Magnetic film, Quality factor",
author = "Masahiro Yamaguchi and Seok Bae and Kim, {Ki Hyeon} and Kenji Tan and Takayuki Kusumi and Kiyoshi Yamakawa",
year = "2005",
month = dec,
day = "1",
doi = "10.1109/MWSYM.2005.1516599",
language = "English",
isbn = "0780388461",
series = "IEEE MTT-S International Microwave Symposium Digest",
pages = "351--354",
booktitle = "2005 IEEE MTT-S International Microwave Symposium Digest",
note = "2005 IEEE MTT-S International Microwave Symposium ; Conference date: 12-06-2005 Through 17-06-2005",
}