FE-B-NB-ND magnetic metallic glass thin film for MEMS/NEMS structure

T. A. Phan, S. M. Lee, Akihiro Makino, Hiroyuki Oguchi, Hiroki Kuwano

研究成果: Conference contribution

1 被引用数 (Scopus)

抄録

This paper presents characteristics of Fe-B-Nb-Nd magnetic metallic glass thin film (MGTF) which is greatly desired for MEMS/NEMS devices. The advantages of the Fe-B-Nb-Nd MGTF include high robustness and soft magnetic property. In our study, we have measured the film characteristics such as structure, surface morphology, hardness, elastic modulus, internal stress, and soft magnetic property. We also report a fabrication process of freestanding micro-cantilevers using this Fe-B-Nb-Nd MGTF for a vibration based micro energy harvester by micromachining techniques.

本文言語English
ホスト出版物のタイトル2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011
ページ428-431
ページ数4
DOI
出版ステータスPublished - 2011 4 13
イベント24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011 - Cancun, Mexico
継続期間: 2011 1 232011 1 27

出版物シリーズ

名前Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN(印刷版)1084-6999

Other

Other24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011
CountryMexico
CityCancun
Period11/1/2311/1/27

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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