Fe-B-Nb-Nd magnetic metallic glass thin film for MEMS and NEMS

Tuan A. Phan, Sangmin Lee, Akihiro Makino, Hiroshi Okamoto, Hiroki Kuwano

研究成果: Conference contribution

抄録

In MEMS/NEMS applications, it is always desirable to have materials with good mechanical properties such as high strength and corrosion resistance. Metallic glass thin films are known to exhibit such properties. Here we report on properties of magnetic metallic glass (Fe 0.72 B 0.24 Nb 0.04 ) (100-x) Nd x (4≤x≤8) thin films formed by electron cyclotron resonance (ECR) ion-beam sputtering. The atomic composition of the thin film is controllable by changing the number of (Fe 0.70 B 0.26 Nb 0.04 ) 80 Nd 20 'chips' combined with a Fe 72 B 24 Nb 4 main target. The glass transition temperature (T g ), the crystallization temperature (T x ) and the supercooled liquid region (ΔT x ) are found to be 850 K, 946 K and 96 K, respectively. An atomically disordered structure was observed by X-ray diffraction, electron diffraction and high resolution transmission electron microscopy. The pristine thin film is found to be a soft magnetic material at room temperature. A 5 μm - thick cantilever was fabricated by using MEMS fabrication technology. We envision its use as a part of microelectric-power generator based on electromagnetic induction effect.

本文言語English
ホスト出版物のタイトル2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010
ページ541-544
ページ数4
DOI
出版ステータスPublished - 2010 11 29
イベント5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010 - Xiamen, China
継続期間: 2010 1 202010 1 23

出版物シリーズ

名前2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010

Other

Other5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010
国/地域China
CityXiamen
Period10/1/2010/1/23

ASJC Scopus subject areas

  • 制御およびシステム工学
  • 電子工学および電気工学

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