Fatigue of micromachined stainless steel structural materials for vibrational energy harvesting

研究成果: Conference article査読

2 被引用数 (Scopus)

抄録

This work presents fatigue measurement for micromachined stainless steel (SUS304) structural substrate using resonant bending mode. Micromachined specimens for fatigue test had a cantilever structure with a proof mass. They were fabricated by FeCl3 wet etching and wire-discharged cutting. The SUS specimens had Young's modulus of 198 GPa on average. The endurance limit of micromachined specimens was 213 MPa on average after 108 cycles under our fracture definition. The large SUS specimens had the endurance limit of 229 MPa after 107 cycles.

本文言語English
論文番号012116
ジャーナルJournal of Physics: Conference Series
773
1
DOI
出版ステータスPublished - 2016 12 14
イベント16th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2016 - Paris, France
継続期間: 2016 12 62016 12 9

ASJC Scopus subject areas

  • 物理学および天文学(全般)

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