Factors influencing the variation of surface acoustic wave velocity in lithium tetraborate

Vincent Vezin, Shinichiro Inui, Kunio Yamaguchi, Tamotsu Sugawara, Ryuichi Komatsu, Satoshi Uda, Kazuhiko Yamanouchi

研究成果: Article査読

2 被引用数 (Scopus)

抄録

Comparison of the resonance frequency of surface acoustic wave (SAW) resonators fabricated on defect-free and highly defective lithium tetraborate wafers was attempted. The intrinsic variation of SAW velocity due to crystal defects, impurities and chemical compositional inhomogeneities for lithium tetraborate wafers is smaller than ±0.011%. In addition, the variation of SAW velocity in a wafer is influenced by the device fabrication process rather than the lithium tetraborate substrate quality.

本文言語English
ページ(範囲)3074-3075
ページ数2
ジャーナルJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
36
5 SUPPL. B
出版ステータスPublished - 1997 5 1
外部発表はい

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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