Fabrication of ultrasonic sensors using micro cantilevers and characteristic measurement in vacuum for acoustic emission sensing

Kengo Takata; Takashi Sasaki; Mitsuyuki Tanaka; Hiroshi Saito; Daisuke Matsuura; Kazuhiro Hane

doi:10.1541/ieejsmas.134.212

Fabrication of ultrasonic sensors using micro cantilevers and characteristic measurement in vacuum for acoustic emission sensing

Kengo Takata, Takashi Sasaki, Mitsuyuki Tanaka, Hiroshi Saito, Daisuke Matsuura, Kazuhiro Hane

工学研究科・ファインメカニクス専攻

研究成果: Article › 査読

抄録

Acoustic emission (AE) sensor is attractive to detect machine fracture in real-time. We fabricated AE sensors using MEMS technology. The AE sensors consist of silicon cantilevers resonating at the frequencies of 50kHz, 100kHz, and 150kHz. Silicon piezoresistors are installed close to the cantilevers. In order to obtain the ambient pressure appropriate for the operation of cantilevers, the Q factor of cantilever is calculated by the analytical models as a function of pressure. The properties of fabricated sensors were measured in vacuum chamber. We also tentatively packaged the AE sensor and an amplifier in vacuum to decrease the influences of air damping and noise.

本文言語	English
ジャーナル	IEEJ Transactions on Sensors and Micromachines
巻	134
号	7
DOI	https://doi.org/10.1541/ieejsmas.134.212
出版ステータス	Published - 2014 1月 1

ASJC Scopus subject areas

電子工学および電気工学
機械工学

文献へのアクセス

10.1541/ieejsmas.134.212

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引用スタイル

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abstract = "Acoustic emission (AE) sensor is attractive to detect machine fracture in real-time. We fabricated AE sensors using MEMS technology. The AE sensors consist of silicon cantilevers resonating at the frequencies of 50kHz, 100kHz, and 150kHz. Silicon piezoresistors are installed close to the cantilevers. In order to obtain the ambient pressure appropriate for the operation of cantilevers, the Q factor of cantilever is calculated by the analytical models as a function of pressure. The properties of fabricated sensors were measured in vacuum chamber. We also tentatively packaged the AE sensor and an amplifier in vacuum to decrease the influences of air damping and noise.",

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AU - Saito, Hiroshi

AU - Matsuura, Daisuke

AU - Hane, Kazuhiro

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