Acoustic emission (AE) sensor is attractive to detect machine fracture in real-time. We fabricated AE sensors using MEMS technology. The AE sensors consist of silicon cantilevers resonating at the frequencies of 50kHz, 100kHz, and 150kHz. Silicon piezoresistors are installed close to the cantilevers. In order to obtain the ambient pressure appropriate for the operation of cantilevers, the Q factor of cantilever is calculated by the analytical models as a function of pressure. The properties of fabricated sensors were measured in vacuum chamber. We also tentatively packaged the AE sensor and an amplifier in vacuum to decrease the influences of air damping and noise.
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