TiN coating was successfully formed by burying a quartz glass substrate into Ti powder and subsequent microwave irradiation in air. The temperature of the powder rapidly rose up to 1100°C by microwave irradiation, and TiN coating was formed on the substrate by vapor phase reaction. Particle size, film thickness, and Vicker's hardness of the coating increased with increasing the irradiation time and microwave power. Similar technique was also applied to form TiCN coating by using mixture of Ti and carbon powder instead of Ti powder. It was revealed that the carbon content, film thickness, and Vicker's hardness of the coating increased with increasing the carbon content in the starting powder.
|ジャーナル||Funtai Oyobi Fummatsu Yakin/Journal of the Japan Society of Powder and Powder Metallurgy|
|出版ステータス||Published - 2010 12|
ASJC Scopus subject areas
- Mechanical Engineering
- Industrial and Manufacturing Engineering
- Metals and Alloys
- Materials Chemistry