Fabrication of thick film magnetic cores for high frequency using LIGA process

Shinsuke Takimoto, Hiroshi Ueno, Susumu Sugiyama, Masahiro Yamaguchi, Makoto Baba, Ken Ichi Arai

研究成果: Conference article

3 引用 (Scopus)

抜粋

Fabrication of magnetic cores with narrow slits which have low eddy current loss for high frequency Ires been investigated. The magnetic cores with narrow slits of 1.5 μm to 5μm in width were fabricated by the LIGA process which is composed of deep X-ray lithography using synchrotron radiation (SR) and Ni electroforming. Magnetic hysteresis loops and permeability of the magnetic cores with various slit widths and distances between slits were measured.

元の言語English
ページ(範囲)2888-2890
ページ数3
ジャーナルIEEE Transactions on Magnetics
37
発行部数4 I
DOI
出版物ステータスPublished - 2001 7
イベント8th Joint Magnetism and Magnetic Materials -International Magnetic Conference- (MMM-Intermag) - San Antonio, TX, United States
継続期間: 2001 1 72001 1 11

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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