Fabrication of magnetic cores with narrow slits which have low eddy current loss for high frequency Ires been investigated. The magnetic cores with narrow slits of 1.5 μm to 5μm in width were fabricated by the LIGA process which is composed of deep X-ray lithography using synchrotron radiation (SR) and Ni electroforming. Magnetic hysteresis loops and permeability of the magnetic cores with various slit widths and distances between slits were measured.
|ジャーナル||IEEE Transactions on Magnetics|
|出版物ステータス||Published - 2001 7|
|イベント||8th Joint Magnetism and Magnetic Materials -International Magnetic Conference- (MMM-Intermag) - San Antonio, TX, United States|
継続期間: 2001 1 7 → 2001 1 11
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering