Fabrication of protonic conductors with nano-structured surface by porous alumina membrane mask

H. Yugami, T. Yoneta, H. Sai

研究成果: Article査読

1 被引用数 (Scopus)

抄録

Nano-structured perovskite-type proton-conducting thin films have been fabricated by SF6 fast atom beam (FAB) etching, with an ordered anodic porous alumina membrane as a lithographic mask. Period hexagonal structures (100 and 500 nm) are patterned on laser ablation-deposited SrCeO3 film on MgO (110) substrate. It is found from X-ray diffraction analysis that the lattice constant a, which is perpendicular to the substrate surface, decreases with decreasing periodicity of the nano-structure. The optical transmission and reflection spectra show typical features of surface-relief grating structures.

本文言語English
ページ(範囲)693-697
ページ数5
ジャーナルSolid State Ionics
154-155
DOI
出版ステータスPublished - 2002 12 2

ASJC Scopus subject areas

  • Chemistry(all)
  • Materials Science(all)
  • Condensed Matter Physics

フィンガープリント 「Fabrication of protonic conductors with nano-structured surface by porous alumina membrane mask」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル