Fabrication of protonic conductors with nano-structured surface by porous alumina membrane mask

H. Yugami; T. Yoneta; H. Sai

doi:10.1016/S0167-2738(02)00519-2

Fabrication of protonic conductors with nano-structured surface by porous alumina membrane mask

H. Yugami, T. Yoneta, H. Sai

工学研究科・機械機能創成専攻

研究成果: Article › 査読

1 被引用数 (Scopus)

抄録

Nano-structured perovskite-type proton-conducting thin films have been fabricated by SF₆ fast atom beam (FAB) etching, with an ordered anodic porous alumina membrane as a lithographic mask. Period hexagonal structures (100 and 500 nm) are patterned on laser ablation-deposited SrCeO₃ film on MgO (110) substrate. It is found from X-ray diffraction analysis that the lattice constant a, which is perpendicular to the substrate surface, decreases with decreasing periodicity of the nano-structure. The optical transmission and reflection spectra show typical features of surface-relief grating structures.

本文言語	English
ページ（範囲）	693-697
ページ数	5
ジャーナル	Solid State Ionics
巻	154-155
DOI	https://doi.org/10.1016/S0167-2738(02)00519-2
出版ステータス	Published - 2002 12 2

ASJC Scopus subject areas

Chemistry(all)
Materials Science(all)
Condensed Matter Physics

文献へのアクセス

10.1016/S0167-2738(02)00519-2

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引用スタイル

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title = "Fabrication of protonic conductors with nano-structured surface by porous alumina membrane mask",

abstract = "Nano-structured perovskite-type proton-conducting thin films have been fabricated by SF6 fast atom beam (FAB) etching, with an ordered anodic porous alumina membrane as a lithographic mask. Period hexagonal structures (100 and 500 nm) are patterned on laser ablation-deposited SrCeO3 film on MgO (110) substrate. It is found from X-ray diffraction analysis that the lattice constant a, which is perpendicular to the substrate surface, decreases with decreasing periodicity of the nano-structure. The optical transmission and reflection spectra show typical features of surface-relief grating structures.",

keywords = "Film, Laser ablation, Nano-fabrication, Nano-ionics, Proton conductors",

author = "H. Yugami and T. Yoneta and H. Sai",

note = "Funding Information: A part of this work was performed in Venture Business Laboratory in Tohoku University and was supported by Grant-in-Aid for Scientific Research from Ministry of Education, Science and Culture. Copyright: Copyright 2004 Elsevier Science B.V., Amsterdam. All rights reserved.",

year = "2002",

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doi = "10.1016/S0167-2738(02)00519-2",

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T1 - Fabrication of protonic conductors with nano-structured surface by porous alumina membrane mask

AU - Yugami, H.

AU - Yoneta, T.

AU - Sai, H.

N1 - Funding Information: A part of this work was performed in Venture Business Laboratory in Tohoku University and was supported by Grant-in-Aid for Scientific Research from Ministry of Education, Science and Culture. Copyright: Copyright 2004 Elsevier Science B.V., Amsterdam. All rights reserved.

PY - 2002/12/2

Y1 - 2002/12/2

N2 - Nano-structured perovskite-type proton-conducting thin films have been fabricated by SF6 fast atom beam (FAB) etching, with an ordered anodic porous alumina membrane as a lithographic mask. Period hexagonal structures (100 and 500 nm) are patterned on laser ablation-deposited SrCeO3 film on MgO (110) substrate. It is found from X-ray diffraction analysis that the lattice constant a, which is perpendicular to the substrate surface, decreases with decreasing periodicity of the nano-structure. The optical transmission and reflection spectra show typical features of surface-relief grating structures.

AB - Nano-structured perovskite-type proton-conducting thin films have been fabricated by SF6 fast atom beam (FAB) etching, with an ordered anodic porous alumina membrane as a lithographic mask. Period hexagonal structures (100 and 500 nm) are patterned on laser ablation-deposited SrCeO3 film on MgO (110) substrate. It is found from X-ray diffraction analysis that the lattice constant a, which is perpendicular to the substrate surface, decreases with decreasing periodicity of the nano-structure. The optical transmission and reflection spectra show typical features of surface-relief grating structures.

KW - Film

KW - Laser ablation

KW - Nano-fabrication

KW - Nano-ionics

KW - Proton conductors

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