Fabrication of porous polyimide nanoparticles and their multilayered film

Gufan Zhao, Takayuki Ishizaka, Hitoshi Kasai, Hachiro Nakanishi

    研究成果: Paper査読

    抄録

    Recently, porous polyimide (PI) nanoparticles have been successfully fabricated by reprecipitation method. After reprecipitation process, porous poly(amic acid) (PAA, precursor of PI) nanoparticles were obtained by using PAA solution adding other polymers as a source of pores. Then porous PI nanoparticles were fabricated by the two-step imidization of porous PAA nanoparticles without morphology transformation. Furthermore, multilayered films assembled by porous PI nanoparticles obtained were also successfully fabricated by electrodeposition method. It provides a new route to interlayer insulation films with lower dielectric constant for the prospective microelectronic applications.

    本文言語English
    ページ数1
    出版ステータスPublished - 2005 12 1
    イベント54th SPSJ Annual Meeting 2005 - Yokohama, Japan
    継続期間: 2005 5 252005 5 27

    Other

    Other54th SPSJ Annual Meeting 2005
    国/地域Japan
    CityYokohama
    Period05/5/2505/5/27

    ASJC Scopus subject areas

    • 工学(全般)

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