Fabrication of pitch-variable MEMS gratings using thermal and electrostatic actuators

Y. Kanamori, T. Kobayashi, K. Hane

研究成果: Conference contribution

抄録

We have fabricated a thermal-driven analog-modulated grating and an electrostatic-driven digital-modulated grating. When the grating period was changed from 4 to 8 μm, approximately 4.2° of the diffraction angle changing was observed. Part of this work was performed at the Micro/Nano-Machining Research and Education Center, Tbhoku University, Japan.

本文言語English
ホスト出版物のタイトルDigest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC
ページ380-381
ページ数2
DOI
出版ステータスPublished - 2007
イベントs20th International Microprocesses and Nanotechnology Conference, MNC 2007 - Kyoto, Japan
継続期間: 2007 11 52007 11 8

出版物シリーズ

名前Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC

Other

Others20th International Microprocesses and Nanotechnology Conference, MNC 2007
国/地域Japan
CityKyoto
Period07/11/507/11/8

ASJC Scopus subject areas

  • ハードウェアとアーキテクチャ
  • 電子工学および電気工学

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