Fabrication of phase reflection sawtooth gratings optimized by scalar and vector way by using diamond cutting

Cha Bum Lee, T. Kuriyagawa, Tae Jun Kim, Sun Kyu Lee

研究成果: Conference contribution

抄録

This paper presents optimization of phase reflection sawtooth gratings with a period of 2.0 μm and a depth of 0.2 μm based on the Fourier transformation (FT) and the rigorous coupled wave analysis (RCWA). And its fabrication on oxygen free Cu and electroless Ni-coated surfaces by using diamond cutting in a shaping process whose toolpath is interfered to provide smaller period. The diffraction efficiencies were estimated 100% for FT, 83.0% and 79.0% for TE and TM polarization of the incident light at a depth of 0.2 μm̃It was found that electroless Ni-coated surface had better performance in terms of machining and optical functionality. From optical testing, the diffraction efficiencies were measured 84.0% and 84.4% for TE and TM polarization, respectively.

本文言語English
ホスト出版物のタイトル2008 Proceedings of the ASME - 2nd International Conference on Integration and Commercialization of Micro and Nanosystems, MicroNano 2008
ページ685-686
ページ数2
DOI
出版ステータスPublished - 2008 12月 1
イベント2008 ASME 2nd International Conference on Integration and Commercialization of Micro and Nanosystems, MicroNano 2008 - Kowloon, Hong Kong
継続期間: 2008 6月 32008 6月 5

出版物シリーズ

名前2008 Proceedings of the ASME - 2nd International Conference on Integration and Commercialization of Micro and Nanosystems, MicroNano 2008

Other

Other2008 ASME 2nd International Conference on Integration and Commercialization of Micro and Nanosystems, MicroNano 2008
国/地域Hong Kong
CityKowloon
Period08/6/308/6/5

ASJC Scopus subject areas

  • バイオテクノロジー
  • 電子工学および電気工学

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