Fabrication of organic thin film transistor(OTFT) Array by using nanoprinting process

Jeongdai Jo, Kwang Young Kim, Eung Sug Lee, Masayoshi Esashi

研究成果: Article

1 引用 (Scopus)

抜粋

The flexible organic thin film transistor(OTFT) array to use as a switching device for an organic light emitting diode(OLED) was designed and fabricated in the nanocontact printing and low-temperature process. The gate, source, and drain electrode patterns of OTFT were fabricated by nanocontact printing process. And dielectric layer of parylene and organic active semiconductor layer of pentacene formed at room temperature or at a temperature lower than 40°C. The nanocontact printing process using SAM and PDMS stamp made it possible to fabricate OTFT arrays with channel lengths down to even submicron size, and reduced the fabrication process by 10 steps compared with photolithography. Since the process was done in room temperature, there was no pattern shrinkage, transformation, and bending problem appeared. Also, it was possible to improve electric field mobility, to decrease contact resistance, to increase close packing of molecules by SAM, and to reduce threshold voltage by using a parylene.

元の言語English
ページ(範囲)385-388
ページ数4
ジャーナルKey Engineering Materials
326-328 I
DOI
出版物ステータスPublished - 2006 1 1

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

フィンガープリント Fabrication of organic thin film transistor(OTFT) Array by using nanoprinting process' の研究トピックを掘り下げます。これらはともに一意のフィンガープリントを構成します。

  • これを引用