Fabrication of multiple al micro-materials by electromigration using a comb pattern and a conductive passivation film

Yasuhiro Kimura, Masumi Saka

研究成果: Conference contribution

3 引用 (Scopus)

抜粋

Electromigration (EM) is the phenomenon of atomic diffusion in a metallic film with a high-density electron flow. Our group used EM to fabricate Al micro-materials. The EM technique can be used to fabricate micro-materials with a high aspect ratio, pure metal components, an arbitrary form, and a single-crystal structure. Recently, two micro-materials have been simultaneously fabricated using an array pattern consisting of parallel or series connections. However, multiple micro-materials have not been fabricated simultaneously thus far. In this study, a new comb sample pattern was used with a conductive passivation film to produce multiple Al micro-materials.

元の言語English
ホスト出版物のタイトルManufacturing and Applied Research
出版者Trans Tech Publications
ページ36-40
ページ数5
ISBN(印刷物)9783038350590
DOI
出版物ステータスPublished - 2014 1 1
イベント2nd International Conference on Manufacturing, Manufacturing 2014 - , Singapore
継続期間: 2014 2 92014 2 10

出版物シリーズ

名前Advanced Materials Research
909
ISSN(印刷物)1022-6680

Other

Other2nd International Conference on Manufacturing, Manufacturing 2014
Singapore
期間14/2/914/2/10

ASJC Scopus subject areas

  • Engineering(all)

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  • これを引用

    Kimura, Y., & Saka, M. (2014). Fabrication of multiple al micro-materials by electromigration using a comb pattern and a conductive passivation film. : Manufacturing and Applied Research (pp. 36-40). (Advanced Materials Research; 巻数 909). Trans Tech Publications. https://doi.org/10.4028/www.scientific.net/AMR.909.36