Fabrication of multilayered film of polyimide nanoparticles for low-k applications

Gufan Zhao, Takayuki Ishizaka, Hitoshi Kasai, Hidetoshi Oikawa, Hachiro Nakanishi

    研究成果: Paper査読

    抄録

    In order to reduce dielectric constant of polyimide, preparation of porous films assembled by polyimide nanoparticles was investigated. We utilized the electrodeposition of polyimide nanoparticles to prepare porous low-k films possessing voids between particles. The film morphology can be controlled by changing electrical potential and dispersion concentration of polyimide nanoparticles. Dielectric properties of porous films obtained will be discussed. Moreover, fabrication of porous polyimide nanoparticles was also studied.

    本文言語English
    ページ3815-3816
    ページ数2
    出版ステータスPublished - 2006 12 1
    イベント55th Society of Polymer Science Japan Symposium on Macromolecules - Toyama, Japan
    継続期間: 2006 9 202006 9 22

    Other

    Other55th Society of Polymer Science Japan Symposium on Macromolecules
    国/地域Japan
    CityToyama
    Period06/9/2006/9/22

    ASJC Scopus subject areas

    • 工学(全般)

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