In order to reduce dielectric constant of polyimide, preparation of porous films assembled by polyimide nanoparticles was investigated. We utilized the electrodeposition of polyimide nanoparticles to prepare porous low-k films possessing voids between particles. The film morphology can be controlled by changing electrical potential and dispersion concentration of polyimide nanoparticles. Dielectric properties of porous films obtained will be discussed. Moreover, fabrication of porous polyimide nanoparticles was also studied.
|出版ステータス||Published - 2006 12 1|
|イベント||55th Society of Polymer Science Japan Symposium on Macromolecules - Toyama, Japan|
継続期間: 2006 9 20 → 2006 9 22
|Other||55th Society of Polymer Science Japan Symposium on Macromolecules|
|Period||06/9/20 → 06/9/22|
ASJC Scopus subject areas