Fabrication of multilayered film of polyimide nanoparticles for low-k applications

Gufan Zhao, Takayuki Ishizaka, Hitoshi Kasai, Hidetoshi Oikawa, Hachiro Nakanishi

研究成果: Paper査読

抄録

In order to reduce dielectric constant of polyimide, preparation of porous films assembled by polyimide nanoparticles was investigated. We utilized the electrodeposition of polyimide nanoparticles to prepare porous low-k films possessing voids between particles. The film morphology can be controlled by changing electrical potential and dispersion concentration of polyimide nanoparticles. Dielectric properties of porous films obtained will be discussed. Moreover, fabrication of porous polyimide nanoparticles was also studied.

本文言語English
ページ3815-3816
ページ数2
出版ステータスPublished - 2006 12 1
イベント55th Society of Polymer Science Japan Symposium on Macromolecules - Toyama, Japan
継続期間: 2006 9 202006 9 22

Other

Other55th Society of Polymer Science Japan Symposium on Macromolecules
CountryJapan
CityToyama
Period06/9/2006/9/22

ASJC Scopus subject areas

  • Engineering(all)

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