The use of amino-functional silane to stabilize monodispersive FePt nanoparticle films on rigid Si substrates was studied. High-resolution scanning electron microscopy (HRSEM) was used for the investigation. The significance of coalescence of the monodispersive nanoparticle film under high-vacuum annealing was also analyzed. The consistency between the HRSEM results and the in-plane x-ray diffractometry measurements was found.
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