Fabrication of miniaturized bi-convex quartz crystal microbalance using reactive ion etching and melting photoresist

Li Li, Takashi Abe, Masayoshi Esashi

研究成果: Conference article査読

22 被引用数 (Scopus)

抄録

In this paper, miniaturized bi-convex quartz crystal microbalance (QCM) has been fabricated using reactive ion etching (RIE) and melting photoresist technology. Due to the convexity of the resonator surface and the small size of the excitation electrode, the energy of the oscillation is trapped at the center so that very little dissipation occurs at the edge. The fabricated bi-convex QCM has superior resonant characteristics compared with a QCM without the bi-convex formation. For example, the QCM with a high-quality value (76000) was realized for a 1mm-diameter electrode QCM with 1.6μm-deep and 2mm-diameter convex formation on both sides. A spurious mode around a fundamental vibration mode became very small or nearly negligible. This technology is useful from the viewpoint of mass production because it does not require polishing. The manufactured bi-convex QCM can be used for sensing liquid properties.

本文言語English
ページ(範囲)496-500
ページ数5
ジャーナルSensors and Actuators, A: Physical
114
2-3
DOI
出版ステータスPublished - 2004 9月 1
外部発表はい
イベントSelected Papers from Transducers 03 - Boston, MA, United States
継続期間: 2003 6月 82003 6月 12

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 器械工学
  • 凝縮系物理学
  • 表面、皮膜および薄膜
  • 金属および合金
  • 電子工学および電気工学

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