Fabrication of inverse opal TiO2 waveguide structure

Lusi Safriani; Bin Cai; Kyoji Komatsu; Okihiro Sugihara; Toshikuni Kaino

doi:10.1143/JJAP.47.1208

Fabrication of inverse opal TiO₂ waveguide structure

Lusi Safriani, Bin Cai, Kyoji Komatsu, Okihiro Sugihara, Toshikuni Kaino

多元物質科学研究所

研究成果: Article › 査読

10 被引用数 (Scopus)

抄録

Inverse opal waveguide structure has been fabricated on patterned polysilane waveguide structure. Embedded inverse opal into patterned polysilane waveguide structure was made up by self assembly of polystyrene template, infiltrated TiO₂ dielectric material and finally calcinated at 400 °C. The proposed fabrication method has successfully created inverse opal TiO₂ on the patterned polysilane waveguide structure.

本文言語	English
ページ（範囲）	1208-1210
ページ数	3
ジャーナル	Japanese journal of applied physics
巻	47
号	2 PART 2
DOI	https://doi.org/10.1143/JJAP.47.1208
出版ステータス	Published - 2008 2月 15

ASJC Scopus subject areas

工学（全般）
物理学および天文学（全般）

文献へのアクセス

10.1143/JJAP.47.1208

他のファイルとリンク

引用スタイル

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KW - Inverse opal

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