Fabrication of high aspect ratio carbon nanotube-carbon composite microstructures based on silicon molding technique

Liang He, Masaya Toda, Yusuke Kawai, Hidetoshi Miyashita, Chuanyu Shao, Mamoru Omori, Toshiyuki Hashida, Takahito Ono

研究成果: Conference contribution

1 被引用数 (Scopus)

抄録

This paper reports the fabrication and characterization of carbon nanotube (CNT)/carbon composite microstructures with higher Young's modulus than that of pyrolysis carbon. Hybrid microstructures consisted of CNT composite and Si are successfully fabricated by micromolding and pyrolysis of a resist (SU-8) mixed with CNTs. The photoresist mixed with CNTs is filled into a Si micromold fabricated by deep reactive ion etching (deep RIE), then the CNT/resist is converted to CNT/carbon microstructures using two-step high temperature pyrolysis process in an inert gas. Then, the Si substrate is patterned by deep RIE. The maximum aspect ratio of the composite structures is approximately 40

本文言語English
ホスト出版物のタイトル2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
ページ2331-2334
ページ数4
DOI
出版ステータスPublished - 2011 9 1
イベント2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 - Beijing, China
継続期間: 2011 6 52011 6 9

出版物シリーズ

名前2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Other

Other2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
国/地域China
CityBeijing
Period11/6/511/6/9

ASJC Scopus subject areas

  • ハードウェアとアーキテクチャ
  • 電子工学および電気工学

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