TY - JOUR
T1 - Fabrication of CNT-carbon composite microstructures using Si micromolding and pyrolysis
AU - He, Liang
AU - Toda, Masaya
AU - Kawai, Yusuke
AU - Miyashita, Hidetoshi
AU - Omori, Mamoru
AU - Hashida, Toshiyuki
AU - Berger, Rüdiger
AU - Ono, Takahito
PY - 2014/2
Y1 - 2014/2
N2 - A fabrication method of carbon nanotube (CNT)-carbon composite microstructures has been developed. CNT-carbon composite microstructures with dimensions from 10 micrometers to several hundred micrometers have been fabricated by pyrolysis process from the patterned SU-8 photoresist mixed with 1 wt% of CNTs at temperature of ~600 C under inert atmosphere. The resulting composite microstructures with a high aspect ratio of ~34 can be successfully fabricated by this novel fabrication method. This research provides a simple approach that is compatible with microfabrication technology and is capable of fabricating composite microstructures with reproducible shape and dimensions, at desired locations. This approach has potential for the further exploring of applications of composite micro/nano structures as functional units in various microdevices. Also the ultramicroindentation hardness of the CNT-carbon composite films was investigated by nanoindentation measurement.
AB - A fabrication method of carbon nanotube (CNT)-carbon composite microstructures has been developed. CNT-carbon composite microstructures with dimensions from 10 micrometers to several hundred micrometers have been fabricated by pyrolysis process from the patterned SU-8 photoresist mixed with 1 wt% of CNTs at temperature of ~600 C under inert atmosphere. The resulting composite microstructures with a high aspect ratio of ~34 can be successfully fabricated by this novel fabrication method. This research provides a simple approach that is compatible with microfabrication technology and is capable of fabricating composite microstructures with reproducible shape and dimensions, at desired locations. This approach has potential for the further exploring of applications of composite micro/nano structures as functional units in various microdevices. Also the ultramicroindentation hardness of the CNT-carbon composite films was investigated by nanoindentation measurement.
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U2 - 10.1007/s00542-013-1771-6
DO - 10.1007/s00542-013-1771-6
M3 - Article
AN - SCOPUS:84893735613
SN - 0946-7076
VL - 20
SP - 201
EP - 208
JO - Microsystem Technologies
JF - Microsystem Technologies
IS - 2
ER -