Fabrication of BaTiO3 micropatterns by a combination of laserinduced pyrolysis method and nano-crystalline seeding technique and their dielectric properties

Yoshio Kobayashi, Naoki Shimizu, Daisuke Nagao, Akira Watanabe, Mikio Konno

研究成果: Article査読

1 被引用数 (Scopus)

抄録

This paper describes a method for fabricating dielectric BaTiO3 (BT) micropatterns. The method used in the present work is a combination of a laser-induced pyrolysis method and a nano-crystalline seeding technique. BT nano-crystalline particles used for the seeding are prepared by hydrolysis of a BT complex alkoxide. A precursor solution of a BT complex alkoxide containing the BT nano-crystalline particles and polyvinylpyrollidone (PVP) is spin-coated on a Pt substrate. Micropatterns with a line width of ca. 1-2 μm are fabricated by irradiating an Ar+ laser beam with a beam waist diameter of 0.74 μm at a laser energy density of 27 MW/cm2 and a scanning speed of 25 μm/s on the spin-coated BT films, and then stripping laser-unirradiated regions on the films with an HCl aqueous solution. The use of BT particles prepared in the presence of PVP with a small molecular weight provides clear micropatterns and high dielectric constant. The dielectric constant and dissipation factor of the micropattern fabricated at 20 vol% BT particles with an average size of 12.9 nm prepared in the presence of PVP with a molecular weight of 10000 attain 78.7 and 0.089, respectively, for a measurement frequency of 100 kHz.

本文言語English
ページ(範囲)132-139
ページ数8
ジャーナルJOURNAL of CHEMICAL ENGINEERING of JAPAN
43
2
DOI
出版ステータスPublished - 2010 2 20

ASJC Scopus subject areas

  • 化学 (全般)
  • 化学工学(全般)

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