Fabrication of Al micro-belts by utilizing electromigration

Yebo Lu, Masumi Saka

研究成果: Article査読

8 被引用数 (Scopus)

抄録

The fabrication of electromigration induced micro-belts in passivated aluminum films was investigated. The experimental sample was a passivated polycrystalline Al line with a slit and a rectangular hole at the anode end. The micro-belts could be formed at predetermined positions, with their length dependent on the current stress time, and their widths and thicknesses controlled by the size of the hole. It was found that the growth of the micro-belt is affected by the purity of Al, the current density and the current stress time. The experimental results are explained in the discussion.

本文言語English
ページ(範囲)2227-2229
ページ数3
ジャーナルMaterials Letters
63
26
DOI
出版ステータスPublished - 2009 10 31

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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