The fabrication of electromigration induced micro-belts in passivated aluminum films was investigated. The experimental sample was a passivated polycrystalline Al line with a slit and a rectangular hole at the anode end. The micro-belts could be formed at predetermined positions, with their length dependent on the current stress time, and their widths and thicknesses controlled by the size of the hole. It was found that the growth of the micro-belt is affected by the purity of Al, the current density and the current stress time. The experimental results are explained in the discussion.
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