Fabrication of actuators using magnetostrictive thin films

T. Honda, K. I. Arai, M. Yamaguchi

研究成果: Conference contribution

17 被引用数 (Scopus)

抄録

A new concept of the microactuation driven by magnetostriction is proposed. We fabricated two kinds of cantilever actuators and a traveling machine, composed of the magnetostrictive thin films on a polyimide film. Amorphous Tb-Fe and Sm-Fe thin films were used as the magnetostrictive materials. These actuators moved without power supply cable and the cantilever actuators exhibited the large deflection in low magnetic fields. Such unique characteristics suggest that the magnetostriction is suitable for the driving force of the microactuator.

本文言語English
ホスト出版物のタイトルAn Investigations of Micro Structures, Sensors, Actuators, Machines and Robotic Systems
出版社Publ by IEEE
ページ51-56
ページ数6
ISBN(印刷版)078031834X
出版ステータスPublished - 1994 1 1
外部発表はい
イベントProceedings of the IEEE Micro Electro Mechanical Systems - Oiso, Jpn
継続期間: 1994 1 251994 1 28

Other

OtherProceedings of the IEEE Micro Electro Mechanical Systems
CityOiso, Jpn
Period94/1/2594/1/28

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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