Fabrication method of quartz glass ring resonator using sacrificial support structure

Muhammad Jehanzeb Khan, Takashiro Tsukamoto, Shuji Tanaka

研究成果: Article査読

1 被引用数 (Scopus)

抄録

In this paper, a novel method to fabricate quartz glass electromagnetically actuated ring resonator for gyroscope application is presented. Sacrificial supporting structures were employed for the fabrication. The fabricated device was electromagnetically driven at resonance, with the resonant frequency of 42 KHz. The Q-factor at the atmospheric pressure was about 142. The frequency difference between primary and secondary mode was 681 Hz.

本文言語English
論文番号115018
ジャーナルJournal of Micromechanics and Microengineering
30
11
DOI
出版ステータスPublished - 2020 11

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 材料力学
  • 機械工学
  • 電子工学および電気工学

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