Fabrication method of micromachined quartz glass resonator using sacrificial supporting structures

Muhammad Jehanzeb Khan, Takashiro Tsukamoto, Muhammad Salman Al Farisi, Shuji Tanaka

研究成果: Article査読

2 被引用数 (Scopus)

抄録

In this study, a novel fabrication method of quartz glass resonators is proposed. The resonators are mechanically supported by Au posts, which are also used as bonding material between the quartz glass device layer and the substrate. The mechanical supporting structures consist of anchor structures and sacrificial supporting structures. The anchor structures remain to support the fabricated resonators during operation while the sacrificial supporting structures are removed during the release process of the resonator. The sacrificial supporting structures were employed to mechanically support the fragile resonator structure during the whole fabrication process. The supporting structures also played a role to dissipate the generated heat during the plasma process and keep the device layer temperature low. Using the proposed method, micromachined resonators were successfully fabricated on a quartz glass substrate. The maximum process temperature was less than 400 °C, thus the method has a large potential as a mean to fabricate quartz glass microstructures on various kind of substrates including the complimentary metal-oxide semiconductor (CMOS) substrates.

本文言語English
論文番号111922
ジャーナルSensors and Actuators, A: Physical
305
DOI
出版ステータスPublished - 2020 4 15

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 器械工学
  • 凝縮系物理学
  • 表面、皮膜および薄膜
  • 金属および合金
  • 電子工学および電気工学

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