Fabrication and characterization of an integrated Schottky emitter array for multi-beam lithography applications

Ching Hsiang Tsai, Takahito Ono, Masayoshi Esashi

研究成果: Conference contribution

抄録

The design, fabrication and characterization of an integrated Schottky emitter array are presented and demonstrated. The integrated emitter array consists of boron-doped diamond heaters with a diamond tip, Si micro gate array and Si focusing lens array. The diamond film is selectively deposited using electrophoresis of diamond seed particles and a hot filament chemical vapor deposition (HF-CVD) technique. The emitters, gate and lens array are electrically isolated from each other on a Pyrex glass substrate. When heating the diamond emitter at a voltage of 2.8 V, an emission current of 490 nA has been observed at an electric field of 0.36 V/μ,m. The emission current was found to be stable with a fluctuation of 2 % per hr. By fitting the measure data with Schottky emission model, the temperature at the emitter was calculated to be 1680°C.

本文言語English
ホスト出版物のタイトルProceedings - CIS Workshops 2007, 2007 International Conference on Computational Intelligence and Security Workshops, CISW 2007
ページ373-376
ページ数4
出版ステータスPublished - 2007
イベント20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007 - Kobe, Japan
継続期間: 2007 1月 212007 1月 25

出版物シリーズ

名前Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN(印刷版)1084-6999

Other

Other20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007
国/地域Japan
CityKobe
Period07/1/2107/1/25

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学
  • 機械工学
  • 電子工学および電気工学

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