Extreme nano-structure control by sputtering for the high density perpendicular recording media and head

Migaku Takahashi, Masakiyo Tsunoda, Shin Saito

研究成果: Conference contribution

1 引用 (Scopus)

抜粋

In order to open a way to realize ultra high density hard disk (HD) drives with fast operation speed utilizing a spin nano-technology, precisely controlled fabrication technology with nano-scale for head and media according to the required properties is essential from material, processes, and physical view point. In the present paper, correlation between process parameter of ultra clean (UC) dry-process proposed by us and structure and physical property for ferro/antiferro interface, magnetic tunnel junctions and perpendicular magnetic recording media will be widely discussed.

元の言語English
ホスト出版物のタイトルECS Transactions - Magnetic Materials, Processes and Devices 10 - 214th ECS Meeting
ページ19-35
ページ数17
エディション45
DOI
出版物ステータスPublished - 2009 11 23
イベントMagnetic Materials, Processes and Devices 10 - 214th ECS Meeting - Honolulu, HI, United States
継続期間: 2008 10 122008 10 17

出版物シリーズ

名前ECS Transactions
番号45
16
ISSN(印刷物)1938-5862
ISSN(電子版)1938-6737

Other

OtherMagnetic Materials, Processes and Devices 10 - 214th ECS Meeting
United States
Honolulu, HI
期間08/10/1208/10/17

ASJC Scopus subject areas

  • Engineering(all)

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  • これを引用

    Takahashi, M., Tsunoda, M., & Saito, S. (2009). Extreme nano-structure control by sputtering for the high density perpendicular recording media and head. : ECS Transactions - Magnetic Materials, Processes and Devices 10 - 214th ECS Meeting (45 版, pp. 19-35). (ECS Transactions; 巻数 16, 番号 45). https://doi.org/10.1149/1.3140007