@inproceedings{a40b955ec0384722aafa7b1278190a27,
title = "Extension of Fracture Lifetime of Silicon Scanning Micromirror by Coating with Atomic Layer Deposited Alumina Thin Film",
abstract = "The silicon scanning micromirrors were coated with atomic layer deposited (ALD) alumina thin film and several fracture characteristics were measured. The coated ALD alumina films were 2.64 nm and 10.6nm in thickness. The fractural lifetime of the coated mirror was extended by more than one-order of cycles than that without coating in the stress amplitude region lower than approximately 2.5 GPa.",
keywords = "alumina coating, atomic layer deposition, fracture lifetime, micromirror, torsion bar",
author = "Yuuki Fujita and Takashi Sasaki and Koichi Fukuda and Tung, {Nguyen Thanh} and Fumio Ogawa and Toshiyuki Hashida and Kazuhiro Hane",
note = "Funding Information: Authors thank K. Imai for his experimental support and M. Nishizawa for the fabrication of test micromirrors. This work was supported by KAKENHI (17H01267). Publisher Copyright: {\textcopyright} 2021 IEEE.; 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021 ; Conference date: 20-06-2021 Through 25-06-2021",
year = "2021",
month = jun,
day = "20",
doi = "10.1109/Transducers50396.2021.9495545",
language = "English",
series = "21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "549--552",
booktitle = "21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021",
}