Extension of Fracture Lifetime of Silicon Scanning Micromirror by Coating with Atomic Layer Deposited Alumina Thin Film

Yuuki Fujita, Takashi Sasaki, Koichi Fukuda, Nguyen Thanh Tung, Fumio Ogawa, Toshiyuki Hashida, Kazuhiro Hane

研究成果: Conference contribution

抄録

The silicon scanning micromirrors were coated with atomic layer deposited (ALD) alumina thin film and several fracture characteristics were measured. The coated ALD alumina films were 2.64 nm and 10.6nm in thickness. The fractural lifetime of the coated mirror was extended by more than one-order of cycles than that without coating in the stress amplitude region lower than approximately 2.5 GPa.

本文言語English
ホスト出版物のタイトル21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021
出版社Institute of Electrical and Electronics Engineers Inc.
ページ549-552
ページ数4
ISBN(電子版)9781665412674
DOI
出版ステータスPublished - 2021 6 20
イベント21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021 - Virtual, Online, United States
継続期間: 2021 6 202021 6 25

出版物シリーズ

名前21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021

Conference

Conference21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021
国/地域United States
CityVirtual, Online
Period21/6/2021/6/25

ASJC Scopus subject areas

  • 電子工学および電気工学
  • 機械工学
  • 制御と最適化
  • 器械工学

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