Experiments using a nano-machining instrument for nano-cutting brittle materials

Wei Gao, Robert J. Hocken, John A. Patten, John Lovingood

研究成果: Article

21 引用 (Scopus)

抜粋

This paper presents a nano-machining instrument, which was developed for conducting nano-cutting experiments especially on brittle materials. A PZT tube scanner is employed to accomplish a maximum depth of cut of 4 μm with 0.1 nm resolution, and a length of cut of 20 μm. The cutting motions are feedback-controlled by using the output of a capacitance probe. There are two force sensors to measure thrust and cutting forces with a resolution of sub-milliNewtons. The sample is kinematically mounted on the PZT scanner, and the tilt of the sample can be adjusted precisely. Experiments of nano-scratching and nano-cutting on single crystal silicon were carried out.

元の言語English
ページ(範囲)439-442
ページ数4
ジャーナルCIRP Annals - Manufacturing Technology
49
発行部数1
DOI
出版物ステータスPublished - 2000 1 1

ASJC Scopus subject areas

  • Mechanical Engineering
  • Industrial and Manufacturing Engineering

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