Experimental study of fullerene-family formation using radio-frequency-discharge reactive plasmas

H. Ishida, N. Satake, G. H. Jeong, Y. Abe, T. Hirata, R. Hatakeyama, K. Tohji, K. Motomiya

研究成果: Conference article査読

24 被引用数 (Scopus)

抄録

A formation regime of fullerenes and carbon nanotubes in glow-discharge reactive plasmas is investigated in order to gain sharp insight into the relation between plasma characteristics and the generation processes of the fullerene families. The plasma is produced in a mixture of CH4 and a small fraction of H2 by the radio-frequency (RF) discharge across an externally-applied magnetic field. The plasma is found to be apparently localized around the RF electrode under certain conditions determined by the magnetic field strength and reactive-gas pressure. In this case, it is demonstrated that fullerenes and carbon nanotubes are most effectively generated on the RF electrode, which is negatively self-biased, and exposed to a strong plasma-sheath drop. Our results indicate that the creation of radical species, such as hydrocarbon precursors, due to the local discharge around the RF electrode, the sheath acceleration of positively-charged particles such as carbon ions, and the abstraction of the hydrogen from hydrogenated-carbon species or clusters, are important in the nucleation, formation, and growth of the fullerene families.

本文言語English
ページ(範囲)26-31
ページ数6
ジャーナルThin Solid Films
407
1-2
DOI
出版ステータスPublished - 2002 3月 22
イベントProceedinggs of the 14th Symposium on Plasma Science for Marteri (SPSM-14) - Tokyo, Japan
継続期間: 2001 6月 132001 6月 14

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 表面および界面
  • 表面、皮膜および薄膜
  • 金属および合金
  • 材料化学

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