Experimental investigation of an air-bearing displacement sensor for on-machine surface form measurement of micro-structures

Kang Won Lee, Young Jin Noh, Wei Gao, Yoshikazu Arai, Yuki Shimizu, Katsutoshi Tanaka, Masahiko Fukuta, Yoshiaki Kai

研究成果: Article査読

15 被引用数 (Scopus)

抄録

This paper presents the experimental results of investigating the performances of an air-bearing displacement sensor for surface form measurement of micro-structures, such as micro-lenses, on an ultra-precision machine tool. The sensor consists of a stylus for contacting the surface, a shaft for mounting the stylus, an air-bearing for suspending the shaft and a blade spring for applying the measuring force against the surface. At first, experiments were conducted on a vibration isolated table to identify the basic performance of the sensor for displacement measurement. Then, the sensor was mounted on a diamond turning machine for evaluating the performance of the sensor for on-machine surface form measurement of micro-lenses. A roll workpiece, on which a micro-lens array was fabricated by using a fast tool servo on the diamond turning machine, was employed as the specimen for the on-machine experiment of surface profile measurement.

本文言語English
ページ(範囲)671-678
ページ数8
ジャーナルInternational Journal of Precision Engineering and Manufacturing
12
4
DOI
出版ステータスPublished - 2011 8

ASJC Scopus subject areas

  • 機械工学
  • 産業および生産工学
  • 電子工学および電気工学

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