Evaluation of TiO2-SiO2 ultra-low-expansion glass fabricated by the soot method using the line-focus-beam ultrasonic material characterization system

Jun Ichi Kushibiki, Mototaka Arakawa, Tetsuji Ueda, Akira Fujinoki

研究成果: Conference contribution

2 被引用数 (Scopus)

抄録

In this paper, we tried to fabricate a TiO2-doped SiO 2 (TiO2-SiO2) glass ingot by the soot method, and homogenized the glass ingot by the zone-melting method. Homogeneities of the specimens were evaluated by measuring leaky surface acoustic wave (LSAW) velocity using the line-focus-beam ultrasonic material characterization system at 225 MHz. Two-dimensional LSAW velocity distributions having an average velocity of 3304.08 m/s with a maximum velocity difference of 3.85 m/s were measured for a homogenized specimen. Striae were not observed for the specimen. The velocity difference corresponds to 17.0 ppb/K from the sensitivity of the LSAW velocity to the CTE {4.41 (ppb/K)/(m/s)}. However, the velocity distributions excluding the edge parts were within ±1.13 m/s, corresponding to the CTE specification of ±5 ppb/K required for EUVL-grade glass. We also discussed the relationship between LSAW velocities and fictive temperatures by heat-treating a part of the homogenized specimen.

本文言語English
ホスト出版物のタイトルEmerging Lithographic Technologies XII
DOI
出版ステータスPublished - 2008 12 1
イベントEmerging Lithographic Technologies XII - San Jose, CA, United States
継続期間: 2008 2 262008 2 28

出版物シリーズ

名前Proceedings of SPIE - The International Society for Optical Engineering
6921
ISSN(印刷版)0277-786X

Other

OtherEmerging Lithographic Technologies XII
CountryUnited States
CitySan Jose, CA
Period08/2/2608/2/28

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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